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For 6" / 8"Wafer ¤Ó Full Automatic Wafer Prober
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ÃÖ´ë 8ÀÎÄ¡ Wafer ´ëÀÀÀÇ Power Device ÃøÁ¤¿ë Automatic ProberÀÔ´Ï´Ù. Á¾ÀüÀÇ ½ÇÀå ÈÄ¿¡ ½Ç½ÃÇß´ø ´ëÀü·ù¿¡ ÀÇÇÑ Æ¯¼º°Ë»ç¸¦ Wafer °Ë»ç°øÁ¤¿¡¼ ½ÇÇö °¡´ÉÇÏ°Ô ÇÏ¿´½À´Ï´Ù.ÃÖ´ë Àü¾Ð 3,000V, Àü·ù 1,200A(Pulse)(´ç»ç Á¦Ç° Probe Block : HC-04 »ç¿ë ½Ã)ÀÇ Power ÃøÁ¤¿¡µµ ´ëÀÀ. ´ç»ç µ¶ÀÚÀÇ ½Å±¸Á¶ Chuck°ú Contactor¿¡ ÀÇÇØ ÀúInductanceÈ, ÀúÀúÇ×ȸ¦ ½ÇÇöÇÏ¿© º¸´Ù Á¤¹ÐÇÑ ÀúR-on ÃøÁ¤, ´ëÀü·ù Ư¼º½ÃÇèÀ» °¡´ÉÇÏ°Ô ÇÏ¿´½À´Ï´Ù.±Ø¹Ú, TAIKO WaferÀÇ ¹Ý¼Û SystemÀ̳ª ¿Âµµ Controller µîÀÇ Optionµµ ¸ðµÎ °®Ãß°í ÀÖ½À´Ï´Ù. |
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High Current Probe Block ¤Ó ´ëÀü·ù ´ëÀÀ Probe Block
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´ëÀü·ù, °íÀü¾Ð¿¡ ´ëÀÀÇÏ´Â Probe BlockÀÔ´Ï´Ù. Á¢Á¡ ¿ÂµµÀÇ »ó½ÂÀ» ¾ïÁ¦ÇÏ´Â µ¶ÀÚÀÇ ´ÙÁ¡Á¢Ã˱¸Á¶·Î ¼ö¸íÀÌ ±ä µ¿½Ã¿¡ Á¢ÃË ¾ÈÁ¤¼ºÀÌ ¿ì¼öÇÏ°í ÀÛÀº µµÃ¼ ÀúÇ×À¸·Î ¿ÀÂ÷¸¦ Àú°¨½Ãŵ´Ï´Ù. Pin ´ÜÀ§ÀÇ ±³È¯ÀÌ °¡´ÉÇÏ°í À¯Áöº¸¼ö¼ºµµ ¿ì¼öÇÕ´Ï´Ù. |
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For 6" / 8" Wafer |
Manual Prober
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Air Bearing Stage¿¡ ÀÇÇÑ °£´ÜÇÑ Á¶ÀÛÀ¸·Î ½Å·Ú¼º ³ôÀº ÃøÁ¤À» ½ÇÇö½Ãŵ´Ï´Ù.
3Steps Adjustment lever¿¡ ÀÇÇÑ Safety lock±â±¸·Î NeedleÀÇ ÆļÕÀ» ¹æÁöÇÏ´Â
Manual ProberÀÔ´Ï´Ù. |
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For 8" Wafer |
Manual Prober
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fA level low leakage test, power MOSFET, IGBTµîÀÇ High Voltage ´ëÀÀ,
Thermo Chuck žÀç°¡ °¡´ÉÇÑ Manual ProberÀÔ´Ï´Ù. |
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For 8" Wafer |
Semi-Automatic Prober
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fA level low leakage test, power MOSFET, IGBTµîÀÇ High Voltage´ëÀÀ, Àüµ¿ Manipulator, Thermo chuck žÀç°¡ °¡´ÉÇÑ Semi-Auto ProberÀÔ´Ï´Ù. |
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Temperature Control System
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AT-200Àº Heat ChuckÀ» »ç¿ëÇÏ¿© 40¡É~300¡ÉÀÇ ¿Âµµ Á¦¾î°¡ °¡´ÉÇÕ´Ï´Ù.
AT-300Àº Thermo ChuckÀ» »ç¿ë¿© -50¡É~200¡ÉÀÇ ¿Âµµ Á¦¾î°¡ °¡´ÉÇÕ´Ï´Ù.
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